AHL9000 空气轴承直线电机平台 Aerotech AHL9000 Linear Motor Stage The AHL9000 linear motor stage combines air bearings for the scan axis and mechanical bearings for the step axis, and has been designed for demanding applications that require excellent step and scan performance. 行程:≤350 mm 定位精度:± 1.0 ?m 重复定位精度:±0.2 ?m 直线度:±0.6 ?m 平面度:±0.6 ?m |